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Surface Roughness Visualization Unit for Semiconductor Quality Control

Capture nano-level crystal defects at a macro scale to improve the accuracy of quality control.

In the semiconductor industry, the detection of fine defects on wafer surfaces is a crucial factor that influences product reliability. Nano-level irregularities and scratches, which are often overlooked in visual or microscopic inspections, can lead to reduced yield and product defects. This unit captures these fine defects over a wide area using off-axis optical systems and edge reflection light detection, contributing to the efficiency of the inspection process and improving the accuracy of quality control. 【Usage Scenarios】 - Quality inspection of wafer surfaces - Early detection of abnormalities in the manufacturing process - Inspection tasks in quality control departments 【Benefits of Implementation】 - Reduction in inspection time - Decrease in defective products - Reduction in quality control costs

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  • Other optical parts
  • Optical inspection unit

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